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Super-Resolution Electrochemical Impedance Imaging with a 100 x 100 CMOS Sensor Array

Hu, K.; Arcadia, C. E.; Rosenstein, J. K.

2021-08-19 bioengineering
10.1101/2021.08.19.456729 bioRxiv
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This paper presents a 100 x 100 super-resolution integrated sensor array for microscale electrochemical impedance spectroscopy (EIS) imaging. The system is implemented in 180 nm CMOS with 10 m x 10 m pixels. Rather than treating each electrode independently, the sensor is designed to measure the mutual capacitance between programmable sets of pixels. Multiple spatially-resolved measurements can then be computationally combined to produce super-resolution impedance images. Experimental measurements of sub-cellular permittivity distributions within single algae cells demonstrate the potential of this new approach.

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